ISO 3567:2011 specifes the physical, technical and metrological conditions to be fulflled when calibrations of vacuum gauges are performed by direct comparison with a reference gauge. From the conditions described, the design of an apparatus that can perform vacuum gauge calibrations in an adequate manner can be deduced.
The vacuum gauges to be calibrated can be of any kind. Many types of gauges consist of several parts.Typically, these are: gauge head, cable, operational device and signal read out. This entire set is considered as the unit that has to be calibrated. Whereas, if only the gauge head (i.e. the part of the vacuum gauge directly exposed to the vacuum) is calibrated, all set-ups and conditions would have to be recorded such that the user of the calibrated gauge head would be able to perform the measurements in the same manner as during the calibration.
