ISO 13095:2014 specifies two methods for characterizing the shape of an AFM probe tip,specifically the shank and approximate tip profiles. These methods project the profile of an AFM probe tip onto a given plane, and the characteristics of the probe shank are also projected onto that plane under defined operating conditions. The latter indicates the usefulness of a given probe for depth measurements in narrow trenches and similar profiles. This International Standard is applicable to the probes with radii greater than 5u 0 , where u 0 is the uncertainty of the width of the ridge structure in the reference sample used to characterize the probe.
